Determination of vacancy concentrations in the bulk of silicon wafers by platinum diffusion experiments
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365796
Reference23 articles.
1. Diffusion Mechanisms and Point Defects in Silicon and Germanium
2. Measurement of Equilibrium Concentrations of Lattice Vacancies in Gold
3. Measurement of Equilibrium Concentrations of Lattice Vacancies in Gold
4. Point defects and dopant diffusion in silicon
5. The effect of oxidation on anomalous diffusion in silicon
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