Atomic layer epitaxy of GaP and elucidation for self‐limiting mechanism
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102675
Reference11 articles.
1. Molecular Layer Epitaxy
2. Atomic layer epitaxy of III‐V binary compounds
3. New approach to the atomic layer epitaxy of GaAs using a fast gas stream
4. GaAs Atomic Layer Epitaxy by Hydride VPE
5. A Growth Analysis for Metalorganic Vapor Phase Epitaxy of GaAs
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