Conformal growth of GaP on high aspect ratio Si structured surface via plasma-enhanced atomic layer deposition

Author:

Uvarov Alexander,Gudovskikh Alexander,Baranov Artem,Maksimova Alina,Vyacheslavova Ekaterina,Kirilenko Demid

Funder

Saint Petersburg State University

Russian Science Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference30 articles.

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5. Effective passivation of black silicon surfaces via plasma-enhanced chemical vapor deposition grown conformal hydrogenated amorphous silicon layer;Özkol;Phys. Status Solidi Rapid Res. Lett.,2020

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