Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1807567
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2. ENVIRONMENTAL AND BIOLOGICAL APPLICATIONS OF EXTENDED X-RAY ABSORPTION FINE STRUCTURE (EXAFS) AND X-RAY ABSORPTION NEAR EDGE STRUCTURE (XANES) SPECTROSCOPIES
3. A soft X-ray absorption study of nanodiamond films prepared by hot-filament chemical vapor deposition
4. Time-and-Space Resolved X-Ray Absorption Spectroscopy of Laser-Ablated Si Particles
5. Characterization of the effects of soft X-ray irradiation on polymers
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