New laboratory EUV reflectometer for large optics using a laser plasma source-Reference-Cited by-同舟云学术

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New laboratory EUV reflectometer for large optics using a laser plasma source

Published:2003-05-27 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

van Loyen Ludwig,Boettger Thomas,Braun Stefan,Mai Hermann,Leson Andreas,Scholze Frank,Tuemmler Johannes,Ulm Gerhard,Legall Herbert,Nickles Peter V.,Sandner Wolfgang,Stiel Holger,Rempel Christian E.,Schulze Mirko,Brutscher Joerg,Macco Fritz,Muellender Stefan

Publisher

SPIE

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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5. Polarization resolved measurements with the new EUV ellipsometer of PTB;SPIE Proceedings;2015-03-13

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