High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges-Reference-Cited by-同舟云学术

High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges

Published:2020-06-01 Issue:6 Volume:91 Page:063103
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Garakhin S. A.¹^ORCID,Chkhalo N. I.¹^ORCID,Kas’kov I. A.¹,Lopatin A. Ya.¹,Malyshev I. V.¹,Nechay A. N.¹,Pestov A. E.¹,Polkovnikov V. N.¹,Salashchenko N. N.¹,Svechnikov M. V.¹,Tsybin N. N.¹,Zabrodin I. G.¹,Zuev S. Yu.¹

Affiliation:

1. Institute for Physics of Microstructures RAS, 603950 Nizhny Novgorod, Russia

Funder

Russian Foundation for Basic Research

The State Assignment for IPM RAS

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5144489

Reference30 articles.

1. Soft X-ray reflectivity and structure evaluation of Ni/C/Ti/C multilayer X-ray mirrors for water-window region

2. Short-period multilayer X-ray mirrors

3. Multilayers with Ultra-Short Periods

4. Recent developments in EUV reflectometry at the Advanced Light Source

5. At-wavelength metrology facility for soft X-ray reflection optics

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