Step-by-step excimer laser induced crystallization of a-Si:H
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126134
Reference10 articles.
1. Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid‐phase crystallization: Theory, experiments, and thin‐film transistor applications
2. Excimer-laser-annealed poly-Si thin-film transistors
3. Laser dehydrogenation/crystallization of plasma‐enhanced chemical vapor deposited amorphous silicon for hybrid thin film transistors
4. Hydrogenation of transistors fabricated in polycrystalline-silicon films
5. Nonequilibrium model of laser-induced phase change processes in amorphous silicon thin films
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