Enhanced formation of the C54 phase of TiSi2 by an interposed layer of molybdenum-Reference-Cited by-同舟云学术

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Enhanced formation of the C54 phase of TiSi2 by an interposed layer of molybdenum

Published:1996-08-12 Issue:7 Volume:69 Page:975-977
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Mouroux A.,Zhang S. ‐L.,Kaplan W.,Nygren S.,Östling M.,Petersson C. S.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.117100

Reference14 articles.

Cited by 90 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. C54-TiSi2 formation using nanosecond laser annealing of A-Si/Ti/A-Si stacks;Thin Solid Films;2024-06

2. Lattice stability and point defect energetics of TiSi2 and TiGe2 allotropes from first-principles calculations;Journal of Applied Physics;2021-02-28

3. Impact of nanosecond laser energy density on the C40-TiSi2 formation and C54-TiSi2 transformation temperature;Journal of Applied Physics;2020-08

4. Titanium-based ohmic contacts in advanced CMOS technology;Journal of Physics D: Applied Physics;2019-09-17

5. The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture;Journal of Applied Physics;2018-05-14

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