AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3495782
Reference18 articles.
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4. Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
5. Lateral-field-excited thin-film Lamb wave resonator
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