Low‐temperature coefficient bulk acoustic wave composite resonators
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93072
Reference3 articles.
1. Acoustic bulk wave composite resonators
2. Measurement of Elastic Constants at Low Temperatures by Means of Ultrasonic Waves–Data for Silicon and Germanium Single Crystals, and for Fused Silica
3. Low‐temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering
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