Workfunction fluctuations in polycrystalline TiN observed with KPFM and their impact on MOSFETs variability
Author:
Affiliation:
1. Electronic Engineering Department, Universitat Autònoma de Barcelona, Barcelona 08193, Spain
2. CITIUS, Universidade de Santiago de Compostela, Santiago de Compostela 15782, Spain
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5090855
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4. Leakage current through the poly-crystalline HfO2: Trap densities at grains and grain boundaries
5. Nanoscale Characterization of TiO2 Films Grown by Atomic Layer Deposition on RuO2 Electrodes
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