Coefficient of thermal expansion and elastic modulus of thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371463
Reference53 articles.
1. Hard amorphous (diamond-like) carbons
2. A study of the properties of hydrogenated amorphous germanium produced by r.f. glow discharge as the electrode gap is varied the link between microstructure and optoelectronic properties
3. Stress and thermomechanical properties of amorphous hydrogenated germanium thin films deposited by glow discharge
4. Residual strains in amorphous silicon films measured by x‐ray double crystal topography
5. A New Method of Measuring Internal Stress in Thin Films Deposited on Silicon by Raman Spectroscopy
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