Residual strains in amorphous silicon films measured by x‐ray double crystal topography
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.333083
Reference12 articles.
1. Measurement of Strains at Si‐SiO2 Interface
2. Measurement of Flexure in Silicon Wafers by the Lang X-ray Diffraction Technique†
3. X‐Ray Determination of Stresses in Thin Films and Substrates by Automatic Bragg Angle Control
Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A self-referenced interferometer for in situ cryogenic wafer curvature measurements;Review of Scientific Instruments;2024-04-01
2. Quantitative Mapping of Deflection and Stress on Encapsulated Silicon Solar Cells;IEEE Journal of Photovoltaics;2018-01
3. Effect of Crystalline Quality on Photovoltaic Performance for ${\rm In}_{0.17}{\rm Ga}_{0.83}{\rm As}$ Solar Cell Using X-Ray Reciprocal Space Mapping;IEEE Journal of Quantum Electronics;2011-11
4. Effect of growth conditions on the Al composition and quality of AlGaN film;Materials Science and Engineering: B;2007-01
5. Investigation of the fracture toughness of radio frequency magnetron sputtered Al–Cu–Fe films via white-beam synchrotron radiography/topography;Journal of Physics D: Applied Physics;2005-05-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3