X‐Ray Determination of Stresses in Thin Films and Substrates by Automatic Bragg Angle Control
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1686299
Reference10 articles.
1. Stress concentration in silicon-insulator interfaces
2. Enhanced X‐Ray Diffraction from Substrate Crystals Containing Discontinuous Surface Films
3. Strain Effects Around Planar Diffused Structures
4. Feedback Control Scheme for Scanning X‐Ray Topography
5. Electromechanical Feedback Control for Lang Topography
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