Comparison of XeF2 and F‐atom reactions with Si and SiO2
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94665
Reference16 articles.
1. The reaction of fluorine atoms with silicon
2. Studies of chemiluminescence accompanying fluorine atom etching of silicon
3. Reaction of fluorine atoms with SiO2
4. The etching of silicon with XeF2vapor
5. Ion-enhanced gas-surface chemistry: The influence of the mass of the incident ion
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