Effects of surface films and film edges on dislocation movement in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.321796
Reference4 articles.
1. Temperature Distribution and Stresses in Circular Wafers in a Row During Radiative Cooling
2. Thermal Stress and Plastic Deformation of Thin Silicon Slices
3. Dislocations in thermally stressed silicon wafers
4. On indentation dislocation rosettes in silicon
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3. On-wafer heating tests to study stability of silicon devices;Microelectronics Reliability;1998-06
4. An on-wafer test structure to measure the effect of thermally-induced stress on silicon devices;Microelectronics Reliability;1997-10
5. In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces;Physica Status Solidi (a);1995-07-16
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