Dislocations in thermally stressed silicon wafers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1654632
Reference10 articles.
1. Temperature Distribution and Stresses in Circular Wafers in a Row During Radiative Cooling
2. Thermal Stress and Plastic Deformation of Thin Silicon Slices
3. Influence of dislocations on properties of shallow diffused transistors
4. Diffusion Pipes in Silicon NPN Structures
5. Slip Patterns on Boron‐Doped Silicon Surfaces
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