Formation of shallow Schottky contacts to Si using Pt‐Si and Pd‐Si alloy films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328850
Reference13 articles.
1. Contact reaction between Si and Pd‐W alloy films
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3. Shallow silicide contact
4. Effect of substrate temperature on the formation of shallow silicide contacts on Si using Pd‐W and Pt‐W alloys
5. Shallow silicide‐to‐silicon contacts: The case of amorphous‐Pd80Si20–to–silicon
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