Application of principal component analysis method for micro-resonator weak resonant signal detection-Reference-Cited by-同舟云学术

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Application of principal component analysis method for micro-resonator weak resonant signal detection

Published:2020-08-01 Issue:8 Volume:91 Page:085002
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Shi Huichao¹^ORCID,Kang Xirui¹,Niu Li¹,Meng Tao²^ORCID,Fan Shangchun³

Affiliation:

1. College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China

2. National Institute of Metrology, Beijing 100029, China

3. School of Instrument Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0005351

Reference31 articles.

1. Etched silicon vibrating sensor

2. Silicon pressure sensor integrates resonant strain gauge on diaphragm

3. A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit

4. A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes

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