A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit-Reference-Cited by-同舟云学术

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A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit

Published:2010-10 Issue:5 Volume:19 Page:1140-1152
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Comi Claudia,Corigliano Alberto,Langfelder Giacomo,Longoni Antonio,Tocchio Alessandro,Simoni Barbara

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/5590382/05570853.pdf?arnumber=5570853

Cited by 121 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. A Review on MEMS Silicon Resonant Accelerometers;Journal of Microelectromechanical Systems;2024-04

3. High-sensitivity fiber optic graphene resonant accelerometer;Optics Letters;2024-03-25

4. Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology;Japanese Journal of Applied Physics;2024-03-21

5. Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators;Journal of Applied Physics;2024-02-22

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