Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators

Abstract

A novel mode-localized acceleration sensor employing an electrostatically coupled resonator and integrating a lever with proof mass is micromachined using standard silicon on insulator (SOI) technology. In order to determine the linear dynamic range of the sensor, a reduced order model is developed while assuming that the resonators vibrate below the critical amplitude. Then, open-loop and closed-loop testing platforms are established to measure the performance of the linearly operating accelerometer in a vacuum environment (less than 5 Pa). Moreover, the corresponding amplifier circuit based on the capacitive detection principle is designed in order to extract and amplify the current signal from the resonators. The obtained results show that the accelerometer sensitivity can be increased by three orders of magnitude when using the relative shift of amplitude ratio as the output metric instead of the relative shift of frequency, and the experimental measurements are consistent with the theoretical predictions. Remarkably, the Allan standard deviation of the mode-localized acceleration sensor obtained from the closed-loop testing circuit is around 5.03 μg.