Etched silicon vibrating sensor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/17/i=8/a=007/pdf
Reference4 articles.
1. Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped Silicon
2. Ethylene Diamine-Catechol-Water Mixture Shows Preferential Etching of p-n Junction
3. Study of the Etch‐Stop Mechanism in Silicon
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