Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
61 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Evolution of micromachined pressure transducers for cardiovascular applications;Sensors and Actuators A: Physical;2015-04
2. Impact of Silicon MEMS—40 Years After;Handbook of Silicon Based MEMS Materials and Technologies;2015
3. Silicon Micromachining: Bulk;Microsensors, MEMS, and Smart Devices;2013-11-30
4. Application of stencil masks for ion beam lithographic patterning;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
5. Impact of Silicon MEMS—30 Years After;Handbook of Silicon Based MEMS Materials and Technologies;2010