A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes-Reference-Cited by-同舟云学术

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A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes

Published:2004-08-11 Issue:11 Volume:14 Page:1530-1536
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Jeong Chihwan,Seok Seonho,Lee Byeungleul,Kim Hyeonched,Chun Kukjin

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Micromachined inertial sensors

2. Concept, implementation, and control of wide bandwidth MEMS gyroscopes

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