Author:
Chen Jianlin,Tsukamoto Takashiro,Langfelder Giacomo,Tanaka Shuji
Funder
New Energy and Industrial Technology Development Organization
Japan Society for the Promotion of Science
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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1. A Mode Matched Tuning Fork Gyroscope Using ScAlN-Based Piezoelectric Driving And Sensing;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02