Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without Dedicated Tuning Electrode-Reference-Cited by-同舟云学术

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Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without Dedicated Tuning Electrode

Published:2024-04 Issue:4 Volume:71 Page:4230-4240
ISSN:0278-0046
Container-title:IEEE Transactions on Industrial Electronics
language:
Short-container-title:IEEE Trans. Ind. Electron.

Author:

Zhao Yang¹^ORCID,Shi Qin¹^ORCID,Xia Guoming¹^ORCID,Qiu Anping¹^ORCID

Affiliation:

1. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China

Funder

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/41/10303745/10130746.pdf?arnumber=10130746

Reference35 articles.

1. Vibration-induced errors in MEMS tuning fork gyroscopes

2. Vibrations rejection in gyroscopes based on piezoresistive nanogauges

3. Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method

4. All-pMOS 50-V Charge Pumps Using Low-Voltage Capacitors

5. Temperature Dependence of Quality Factor in MEMS Resonators

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Active Probe Card for Multi-Parameter Fast Characterization of Mems Gyroscope at Wafer-Level;2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2024-03-25

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