Thermal Stabilization of Quality Factor for Dual-Axis MEMS Gyroscope Based on Joule Effect In Situ Dynamic Tuning
Author:
Affiliation:
1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Integrated Circuits, Peking University, Beijing, China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx7/41/10184152/10061464.pdf?arnumber=10061464
Reference29 articles.
1. Bias Contributions in a MEMS Tuning Fork Gyroscope
2. Error Sources in In-Plane Silicon Tuning-Fork MEMS Gyroscopes
3. Temperature Dependence of Quality Factor in MEMS Resonators
4. Electrostatic stabilization of thermal variation in quality factor using anchor loss modulation
5. Electrical coupling suppression and transient response improvement for a microgyroscope using ascending frequency drive with a 2-DOF PID controller
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