Author:
Ikeda Kyoichi,Kuwayama Hideki,Kobayashi Takashi,Watanabe Tetsuya,Nishikawa Tadashi,Yoshida Takashi,Harada Kinji
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Pressure sensor using Si resonant-beam strain gauge;Ikeda;Proc. SICE '86, Tokyo Japan,1986
2. Etched silicon vibrating sensor;Greenwood;J. Phys. E.,1984
3. Pressure dependence of resonant diaphragm pressure sensor;Smith;Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, U.S.A.,11141985
4. Novel optically exited resonant pressure sensor;Thonton;Electron. Lett.,1988
5. Sensitivity and mode spectrum of a frequency-output silicon pressure sensor;Andres;Sensors and Actuators,1988
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