Film‐edge‐induced stress in substrates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.326575
Reference7 articles.
1. Effects of surface films and film edges on dislocation movement in silicon
2. Film‐edge‐induced stress in silicon substrates
3. Dislocation propagation and emitter edge defects in silicon wafers
4. Effects of ion implantation on substrate hardening and film stress reduction and their effect on the yield of bipolar transistors
5. X‐Ray Extinction Contrast Topography of Silicon Strained by Thin Surface Films
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