Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2152115
Reference14 articles.
1. Intrinsic microcrystalline silicon: A new material for photovoltaics
2. Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma
3. Hydrogen in amorphous and microcrystalline silicon films prepared by hydrogen dilution
4. Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane
5. Microcrystalline silicon solar cells deposited at high rates
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