Crystallographic characterization of epitaxial Pb(Zr,Ti)O3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1558951
Reference24 articles.
1. Ferroelectric Memories
2. Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions
3. Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide
4. Piezoelectric Properties and Acoustic Wave Detection of Pb(Zr0.52Ti0.48)O3 Thin Films for Microelectromechanical Systems Sensor
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1. In-situ study on piezoelectric responses of sol-gel derived epitaxial Pb[Zr,Ti]O3 thin films on Si substrate;Journal of the European Ceramic Society;2024-06
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3. Compositional Modification of Epitaxial Pb(Zr,Ti)O3 Thin Films for High‐Performance Piezoelectric Energy Harvesters;Advanced Materials Interfaces;2023-10-27
4. Internal stress effects on the piezoelectric properties of Pb(Zr,Ti)O3 superlattice thin films grown on Si substrates;Applied Physics Letters;2023-03-20
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