Author:
Muralt P,Kholkin A,Kohli M,Maeder T
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Ferroelectric thin film ultrasonic micromotors;Udayakumar,1991
2. Hybrid ultrasonic micromachined motors;Racine,1993
3. Ultrasonic micromotors: physics and applications;Moroney,1990
4. A review of silicon microphones;Scheeper;Sensors and Actuators A,1994
5. Fabrication and characterization of PZT thin film vibrators for micromotors;Muralt;Sensors and Actuators A,1995
Cited by
170 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献