Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide-Reference-Cited by-同舟云学术

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Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide

Published:2000-05-15 Issue:Part 1, No. 5A Volume:39 Page:2859-2862
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Lee Sun-Ho,Jeon Min-Seok,Hong Kyung-Il,Lee Jin-Won,Kim Chang-Kyung,Choi Duck-Kyun

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Combinatorial study of the phase development of sputtered Pb(Zr,Ti)O3 films;Japanese Journal of Applied Physics;2020-09-17

2. Hot aluminum substrate induced hexagonal‐tetragonal phase transitions in InSe and performance of Al/InSe/Cu 2 O pn tunneling devices;Microwave and Optical Technology Letters;2020-08-25

3. EFFECT OF SPUTTERING WORKING PRESSURE ON MICROSTRUCTURES AND PROPERTIES OF PZT THIN FILMS;Integrated Ferroelectrics;2010-06-15

4. The alternative route of low-temperature preparation of highly oriented lead zirconate titanate thin films by high gas-pressure processing;Journal of Materials Research;2008-11

5. Low-temperature preparation of sputter-deposited Pb(Zr0.52Ti0.48)O3 thin films through high oxygen-pressure annealing;Journal of Crystal Growth;2008-02

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