Piezoelectric properties of epitaxial Pb(Zr,Ti)O3 thin films grown on Si substrates by the sol–gel method-Reference-Cited by-同舟云学术

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Piezoelectric properties of epitaxial Pb(Zr,Ti)O3 thin films grown on Si substrates by the sol–gel method

Published:2023-01 Issue: Volume:764 Page:139612
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Tan Goon^ORCID,Kweon Sang-Hyo^ORCID,Kanno Isaku

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Ferroelectric thin films: Review of materials, properties, and applications;Setter;J. Appl. Phys.,2006

2. Thin film piezoelectrics for MEMS;Trolier-Mckinstry;J. Electroceramics,2004

3. Piezoelectric MEMS for energy harvesting;Kim;MRS Bull,2012

4. Piezoelectric thin films for MEMS applications;Kanno;Integr. Microsyst. Electron. Photonics, Biotechnol.,2017

5. Simple millimeter-scale robot using Pb(Zr,Ti) piezoelectric thin film actuator on titanium substrate;Hida;Microsyst. Technol.,2016

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhancement of the piezoelectric properties of (100) BiFeO₃ films on Si by all-sputtered epitaxial growth;Japanese Journal of Applied Physics;2024-09-02

2. Preparation and patterning of HfO2 film via sol–gel method and resistive switching effect of Pt/HfO2/LaNiO3;Materials Science in Semiconductor Processing;2024-08

3. Enhancement of Ion-Sensitive Field-Effect Transistors through Sol-Gel Processed Lead Zirconate Titanate Ferroelectric Film Integration and Coplanar Gate Sensing Paradigm;Chemosensors;2024-07-09

4. Semiconductive lead zirconate titanate thin films grown by pulsed laser deposition;Lithuanian Journal of Physics;2024-07-02

5. In-situ study on piezoelectric responses of sol-gel derived epitaxial Pb[Zr,Ti]O3 thin films on Si substrate;Journal of the European Ceramic Society;2024-06

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