Microstructure of low temperature grown AlN thin films on Si(111)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370600
Reference22 articles.
1. GaN, AlN, and InN: A review
2. GHz-Band Surface Acoustic Wave Devices Using Aluminum Nitride Thin Films Deposited by Electron Cyclotron Resonance Dual Ion-Beam Sputtering
3. Preparation ofc-Axis Oriented AlN Thin Films by Low-Temperature Reactive Sputtering
4. Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer
5. Crystalline structure of AlGaN epitaxy on sapphire using AlN buffer layers
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