Semi-quantitative analysis of the depth distribution of radiative recombination centers in silicon power devices by cross-sectional cathodoluminescence

Author:

Sugie R.,Inoue K.,Yoshikawa M.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Applications of Raman, IR, and CL Spectroscopy;Advanced Optical Spectroscopy Techniques for Semiconductors;2023

2. Minority-carrier dynamics in β-gallium oxide probed by depth-resolved cathodoluminescence;Journal of Physics D: Applied Physics;2022-09-23

3. Analysis of micro LED chip after laser transfer;2022 International Conference on Electronics Packaging (ICEP);2022-05-11

4. Low-energy cross-sectional cathodoluminescence analysis of the depth distribution of point defects in Si-ion-implanted β-Ga2O3;Applied Physics Express;2020-11-23

5. Evaluation of residual defects created by plasma exposure of Si substrates using vertical and lateral pn junctions;Journal of Vacuum Science & Technology B;2020-01

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