Numerical characterization of magnetized capacitively coupled argon plasmas driven by combined dc/rf sources-Reference-Cited by-同舟云学术

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Numerical characterization of magnetized capacitively coupled argon plasmas driven by combined dc/rf sources

Published:2017-03 Issue:3 Volume:24 Page:033504
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Yang Shali¹,Zhang Ya²,Wang Hong-Yu³,Wang Shuai⁴^ORCID,Jiang Wei¹

Affiliation:

1. School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China

2. School of Science, Wuhan University of Technology, Wuhan 430070, China

3. School of Physics Science and Technology, Anshan Normal University, Anshan 114005, China

4. Department of Physics, College of Sciences, Northeastern University, Shenyang 110891, China

Funder

Scientific Foundation of Ministry of Education of China

National Natural Science Foundation of China (NSFC)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4977806

Reference55 articles.

1. Oxidation of silicon in an electron cyclotron resonance oxygen plasma: Kinetics, physicochemical, and electrical properties

2. Growth of silicon oxide on silicon in the thin film region in an oxygen plasma

3. Advanced plasma technology in microelectronics

4. A time-dependent analytical sheath model for dual-frequency capacitively coupled plasma

5. Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

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1. Kinetic behavior of secondary electrons in a magnetized voltage-driven discharge using combined rf/dc sources;Physica Scripta;2024-04-11

2. Plasma density enhancement in radio-frequency hollow electrode discharge;Plasma Science and Technology;2024-04-01

3. Theory of self-generated vortex flows in a tokamak magnetic island;Reviews of Modern Plasma Physics;2024-03-21

4. Hollow cathode effect in radio frequency hollow electrode discharge in argon;Chinese Physics B;2024-03-01

5. Numerical characterization of dual-frequency capacitively coupled plasmas modulated by electron beam injection;Physica Scripta;2024-01-17

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