Kinetic behavior of secondary electrons in a magnetized voltage-driven discharge using combined rf/dc sources

Abstract

Abstract This study employed particle-in-cell/Monte Carlo simulations, along with test particle methods, to examine the characteristics of secondary electrons (SEs) in a voltage-driven discharge using combined rf/dc sources and operates in the presence of a magnetic field. The behavior of SEs is significantly influenced by the magnetic field, leading to the emergence of complex branches in temporal electron energy probability distributions and spatiotemporal electron density distributions within the sheath. The number of branches is directly correlated to the cyclotron period. Moreover, the application of a direct current (dc) source thickens the sheath at the dc biased electrode while attenuating the sheath on the opposite side. This leads to an asymmetrical modulation of the kinetic behavior of SEs in the two sheaths, ultimately resulting in a substantial increase in electron energy on the side of the dc biased electrode.