A time-dependent analytical sheath model for dual-frequency capacitively coupled plasma
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2372757
Reference41 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges
3. Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation
4. Particle and fluid simulations of low-temperature plasma discharges: benchmarks and kinetic effects
5. Self‐consistent fluid modeling of radio frequency discharges in two dimensions
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