Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.96.205001/fulltext
Reference16 articles.
1. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
2. Power dissipated in low‐pressure radio‐frequency discharge plasmas
3. Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges
4. Analytical model of a dual frequency capacitive sheath
5. Analytic model for a dual frequency capacitive discharge
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