Study of the structure of radio frequency glow discharges in CH4and H2by spatiotemporal optical emission spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351137
Reference30 articles.
1. Transition between different regimes of rf glow discharges
2. Comparison of experimental measurements and model predictions for radio‐frequency Ar and SF6 discharges
3. Modeling of a rf glow discharge plasma
4. Numerical modeling of low-pressure RF plasmas
5. Particle simulations of radio-frequency glow discharges
Cited by 52 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms;Physics Letters A;2024-02
2. Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code;Plasma Sources Science and Technology;2023-04-01
3. Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode;Plasma Sources Science and Technology;2023-04-01
4. Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas;Journal of Vacuum Science & Technology B;2021-03
5. Effects of driving frequency on plasma density in Ar and H2/Ar capacitively coupled plasmas at Torr-order pressure;Japanese Journal of Applied Physics;2020-12-29
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3