Modeling of a rf glow discharge plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.101277
Reference18 articles.
1. Fluid model simulations of a 13.56‐MHz rf discharge: Time and space dependence of rates of electron impact excitation
2. Large‐signal time‐domain modeling of low‐pressure rf glow discharges
3. Continuum modeling of argon radio frequency glow discharges
4. Numerical model of rf glow discharges
5. Self‐consistent simulation of a parallel‐plate rf discharge
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