Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge-Reference-Cited by-同舟云学术

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Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

Published:2018-06 Issue:6 Volume:25 Page:063501
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Sharma S.¹²,Sirse N.³,Turner M. M.³^ORCID,Ellingboe A. R.³

Affiliation:

1. Basic Theory and Simulation Division, Institute for Plasma Research, Gandhinagar 382428, India

2. Homi Bhabha National Institute, Anushaktinagar, Mumbai 400094, India

3. School of Physical Sciences and National Centre for Plasma Science and Technology (NCPST), Dublin City University, Dublin 9, Republic of Ireland

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5031221

Reference42 articles.

1. Influence of plasma excitation frequency fora-Si:H thin film deposition

2. Capacitively coupled glow discharges at frequencies above 13.56 MHz

3. Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition

4. Dual excitation reactive ion etcher for low energy plasma processing

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1. A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms;Physics Letters A;2024-02

2. Accuracy of the explicit energy-conserving particle-in-cell method for under-resolved simulations of capacitively coupled plasma discharges;Physics of Plasmas;2024-02-01

3. Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices;Physics of Plasmas;2023-10-01

4. Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field;Physics of Plasmas;2023-09-01

5. Kinetic simulation of a 50 mTorr capacitively coupled argon discharge over a range of frequencies and comparison to experiments;Physics of Plasmas;2023-08-01

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