Annealing of isolated amorphous zones in silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1562336
Reference14 articles.
1. Nucleation of damage centres during ion implantation of silicon
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5. A defect model for ion-induced crystallization and amorphization
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