Unusual growth of polycrystalline oxide film induced by negative ion bombardment in the capacitively coupled plasma deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4769224
Reference22 articles.
1. Elasto-plastic properties of IBAD TiN films made under off-normal incidence
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5. Low energy ion assist during deposition — an effective tool for controlling thin film microstructure
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