IBAD c-axis parallel ZnO piezoelectric film stack for gyroscope applications
Author:
Affiliation:
1. Waseda University,Tokyo,Japan
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9957114/9957143/09957235.pdf?arnumber=9957235
Reference23 articles.
1. Control of in-plane and out-of-plane texture in shear mode piezoelectric ZnO films by ion-beam irradiation
2. Highly Oriented ZnO Thin Films Deposited by Grazing Ion-Beam Sputtering: Application to Acoustic Shear Wave Excitation in the GHz Range
3. Effects of Sputtering Gas Conditions on Formation of (11\bar20) Textured ZnO Films
4. Characteristics of Pure-shear Mode BAW Resonators Consisting of (1120) Textured ZnO Films
5. Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane
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