Highly Oriented ZnO Thin Films Deposited by Grazing Ion-Beam Sputtering: Application to Acoustic Shear Wave Excitation in the GHz Range
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference20 articles.
1. Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane
2. Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (112¯0) textured ZnO films
3. Control of in-plane and out-of-plane texture in shear mode piezoelectric ZnO films by ion-beam irradiation
4. Development of Substrate Structures and Processes for Practical Applications of Various Surface Acoustic Wave Devices
5. Thin film resonator technology
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1. Quasi-Shear Mode Electromechanical Coupling Coefficient of c-Axis Tilted MgZnO Thin Films;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10
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3. Quantitative thickness measurement of polarity-inverted piezoelectric thin-film layer by scanning nonlinear dielectric microscopy;Japanese Journal of Applied Physics;2017-09-28
4. Texture modification of wurtzite piezoelectric films by ion beam irradiation;Surface and Coatings Technology;2011-11
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