Preferential zinc sputtering during the growth of aluminum doped zinc oxide thin films by radio frequency magnetron sputtering-Reference-Cited by-同舟云学术

Preferential zinc sputtering during the growth of aluminum doped zinc oxide thin films by radio frequency magnetron sputtering

Published:2022 Issue:39 Volume:10 Page:14444-14452
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Norrman Kion¹²,Norby Poul¹^ORCID,Stamate Eugen³^ORCID

Affiliation:

1. Department of Energy Conversion and Storage, Technical University of Denmark, Anker Engelunds Vej, Kgs. Lyngby 2800, Denmark

2. Center for Integrative Petroleum Research, College of Petroleum Engineering & Geosciences, King Fahd University of Petroleum and Minerals, KFUPM Box 5070, 34464 Dhahran, Saudi Arabia

3. National Centre for Nano Fabrication and Characterization, Technical University of Denmark, Ørsteds Plads, Kgs. Lyngby 2800, Denmark

Abstract

Zn depletion by energetic negative oxygen ion re-sputtering is one of the main factors influencing the optoelectronic properties of aluminum doped zinc oxide thin films deposited by RF magnetron sputtering.

Funder

Innovationsfonden

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2022/TC/D2TC02180C

Reference59 articles.

1. Past achievements and future challenges in the development of optically transparent electrodes

2. Transparent conductors as solar energy materials: A panoramic review

3. Transparent conducting oxide semiconductors for transparent electrodes

4. The Quest for Zero Loss: Unconventional Materials for Plasmonics

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