Printed thick-film mechanical microsystems (MEMS)
Author:
Publisher
Elsevier
Link
http://woodhead.metapress.com/index/HV03265H06823330.pdf
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2. Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms;Beeby;Sensors and Actuators A: Physical,2001
3. Processing of PZT piezoelectric thick-films on silicon for microelectromechanical systems;Beeby;Journal of Micromechanics and Microengineering,1999
4. Microprocessor implemented self validation of thick-film PZT/Silicon accelerometer;Beeby;Sensors and Actuators A: Physical,2001
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