Author:
Beeby S.P.,Grabham N.J.,White N.M.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. A novel micropump designed with thick-film piezoelectric actuation;Koch;Meas. Sci. Technol.,1997
2. Thick-film printing of PZT onto silicon;Maas;Mater. Lett.,1997
3. N. Harris, M. Koch, S.P. Beeby, N.M. White, A.G.R. Evans, Thick-film printing of PZT onto silicon for micromechanical applications, in: Proceedings of the 9th Micromechanics Europe Workshop (MME’98), 3–5 June 1998, Ulvik, Norway, pp. 78–81.
4. Processing of PZT piezoelectric thick-films on silicon for microelectromechanical systems;Beeby;J. Micromech. Microeng.,1999
5. A novel thick-film PZT/micromachined silicon accelerometer;Beeby;Electron. Lett.,1999
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献